contact cleaner should be OK, but CARB or THROTTLE BODY cleaner is not.
is it a "resistive wire" type MAF or a vane-type MAF? yung resistive wire ang pwedeng i-contact cleaner. You have to open up your air intake though para makita. It should look silvery. If it's brown or black..... bad yun. :P

Very expensive pa naman ang MAF. Kahit sa Jap car 5 digits ang cost nun (new). I assume you are using a Benz? pa-casa mo nalang. Katakot.